Performance evaluation of a vibration desensitized scanning white light interferometer

Surface metrology instruments normally require thermal, seismic and acoustic isolation. Shop-floor metrology solutions offer reduced cost and process time. If they operate on the same principles as laboratory devices, an inherent sensitivity to vibration remains. This paper describes a methodology for evaluating 'environmental tolerance' and applying it to characterize a recently introduced 'environmentally tolerant' scanning white light interferometer (SWLI). Previously published measurements of replicated nickel reference standards on the new instrument and on a stylus profilometer showed good correlation. Surface topography repeatabilities (per ISO 25178-604:2013) were insignificantly different when evaluated on the SWLI instrument in a metrology laboratory and in a manufacturing area. Measurements of reference standards under forced vibration of the entire instrument show maximum ripple error and data dropout in regions of structural resonance. Measurements were performed with large forced horizontal and vertical sample oscillation beneath the objective, exhibiting maximum ripple error near odd integer multiples of half the instrument detector frequency. Error due to data dropout was also investigated.