journal article·2025-09

Fabrication of large-area uniform silicon nanohole arrays with high aspect ratio by ultrasound-enhanced metal-assisted chemical etching

Jiecai Long, Congkai Xie, Xuan Zhang, Haojun Zhang, Xun Chen, Guohuai Lin, Huitao Liu, Yun Chen, Renquan Lu, Xin Chen

Publisher page

Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

Source: Not provided · Quality: missing

Research context

OpenAlex topics: Nanowire Synthesis and Applications · Silicon Nanostructures and Photoluminescence · Advancements in Semiconductor Devices and Circuit Design

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (49)

Show source-provided references
1. Nanoporous anti-fouling silicon membranes for biosensor applications10.1016/S0956-5663(00)00088-9 ↗
2. Fabrication and characteristics of black silicon for solar cell applications: an overview10.1016/j.mssp.2014.02.005 ↗
3. Nanoporous black multi-crystalline silicon solar cells: realization of low reflectance and explanation of high recombination loss10.1016/j.mssp.2012.08.006 ↗
4. Nanoporous silicon produced by metal-assisted etching: a detailed investigation of optical and contact properties for solar cells10.1109/JPHOTOV.2015.2392937 ↗
5. Metal assisted chemical etching for high aspect ratio nanostructures: a review of characteristics and applications in photovoltaics10.1016/j.cossms.2011.11.002 ↗
6. Photonic crystal membrane reflectors by magnetic field-guided metal-assisted chemical etching
7. Through-Silicon via (TSV)10.1109/JPROC.2008.2007462 ↗
8. Solid-state nanopore sensors10.1038/s41578-020-0229-6 ↗
9. High-performance separation of nanoparticles with ultrathin porous nanocrystalline silicon membranes10.1021/nn102064c ↗
10. Achieving a sub-10 nm nanopore array in silicon by metal-assisted chemical etching and machine learning10.1088/2631-7990/abff6a ↗
11. Wafer-scale fabrication of hierarchically porous silicon and silica by active nanoparticle-assisted chemical etching and pseudomorphic thermal oxidation
12. Investigating the Ag-assisted chemical etching kinetics in growing Si-NWs and fabricating the p-i-n core–shell heterojunction Si-NW array solar cells10.1021/acs.energyfuels.3c02175 ↗
13. Fabrication of silicon nanowires by metal-assisted chemical etching combined with micro-vibration10.3390/ma16155483 ↗
14. Development of a metal-assisted chemical etching method to improve light-capture in monocrystalline silicon solar cells10.1016/j.solmat.2022.112143 ↗
15. Comparing metal assisted chemical etching of N and P-type silicon nanostructures10.1016/j.mne.2023.100178 ↗
16. Metal assisted chemical etch of polycrystalline silicon
17. Etching methods for texturing industrial multi-crystalline silicon wafers: a comprehensive review10.1016/j.solmat.2021.111531 ↗
18. Densely packed arrays of ultra-high-aspect-ratio silicon nanowires fabricated using block-copolymer lithography and metal-assisted etching10.1002/adfm.200900181 ↗
19. Minimizing isolate catalyst motion in metal-assisted chemical etching for deep trenching of silicon nanohole array10.1021/acsami.7b04565 ↗
20. Metal-assisted chemical etching of silicon: a review10.1002/adma.201001784 ↗
21. Structuring of Si into multiple scales by metal-assisted chemical etching10.1002/adma.202005932 ↗
22. Silicon nanowires synthesis by metal-assisted chemical etching: a review10.3390/nano11020383 ↗
23. Replacing metals with oxides in metal-assisted chemical etching enables direct fabrication of silicon nanowires by solution processing10.1021/acs.nanolett.1c00178 ↗
24. Metal-assisted chemical etching of silicon in oxidizing HF solutions: origin, mechanism, development, and black silicon solar cell application10.1002/adfm.202005744 ↗
25. Metal-assisted chemical etching of silicon in HF–H2O210.1016/j.electacta.2008.03.009 ↗
26. Morphology-graded silicon nanowire arrays via chemical etching: engineering optical properties at the nanoscale and macroscale10.1021/acsami.9b21466 ↗
27. Mass fabrication of 3D silicon nano-/microstructures by fab-free process using tip-based lithography10.1002/smll.202005036 ↗
28. Large-scale synthesis of highly uniform silicon nanowire arrays using metal-assisted chemical etching10.1021/acs.chemmater.0c03593 ↗
29. Ultrafine filteration of metal catalysts enables fabrication of silicon nanowires with diameter approaching a unit cell size10.1021/acs.nanolett.3c00209 ↗
30. Low-cost plasma etching method for achieving size controlled non-close-packed monolayer arrays of polystyrene nano-spheres10.3390/nano9040605 ↗
31. Fabricating and controlling silicon zigzag nanowires by diffusion-controlled metal-assisted chemical etching method10.1021/acs.nanolett.7b01320 ↗
32. Controlling kink geometry in nanowires fabricated by alternating metal-assisted chemical etching10.1021/acs.nanolett.6b04410 ↗
33. Scaling the aspect ratio of nanoscale closely packed silicon vias by MacEtch: kinetics of carrier generation and mass transport
34. A MACEing silicon: towards single-step etching of defined porous nanostructures for biomedicine10.1016/j.pmatsci.2019.100636 ↗
35. Catalyst self-assembly for scalable patterning of sub 10 nm ultrahigh aspect ratio nanopores in silicon10.1021/acsami.6b01927 ↗
36. Sub-100-nm ordered silicon hole arrays by metal-assisted chemical etching10.1186/1556-276X-8-410 ↗
37. Dense arrays of uniform submicron pores in silicon and their applications10.1021/am506891d ↗
38. Mechanism of mass-transfer enhancement in textiles by ultrasound10.1002/aic.10005 ↗
39. Investigations in mass transfer enhancement in textiles with ultrasound10.1016/j.ces.2003.09.018 ↗
40. Ultrasonic degradation of polysaccharide from a red algae (Porphyra yezoensis)10.1021/jf052763h ↗
41. A review of recent development in numerical simulation of ultrasonic-assisted gas-liquid mass transfer process10.1016/j.compchemeng.2021.107498 ↗
42. Numerical simulations and electrochemical experiments of the mass transfer of microvias electroforming under ultrasonic agitation10.1016/j.ultsonch.2018.07.002 ↗
43. Numerical simulation of ultrasonic enhancement on mass transfer in liquid–solid reaction by a new computational model10.1016/j.ultsonch.2013.09.002 ↗
44. Mass transfer analysis of a concentration-regulated metal-assisted chemical etching system and its application in Si nanohole fabrication10.1016/j.cej.2025.162997 ↗
45. Schottky barrier catalysis mechanism in metal-assisted chemical etching of silicon10.1021/acsami.6b01020 ↗
46. Multifunctional porous silicon nanopillar arrays: antireflection, superhydrophobicity, photoluminescence, and surface-enhanced Raman scattering10.1088/0957-4484/24/24/245704 ↗
47. Mesoporosity in doped silicon nanowires from metal assisted chemical etching monitored by phonon scattering10.1088/0268-1242/31/1/014003 ↗
48. Influence of inhomogeneous porosity on silicon nanowire raman enhancement and leaky mode modulated photoluminescence10.1039/C4NR06329E ↗
49. Quantitative analysis of the phonon confinement effect in arbitrarily shaped Si nanocrystals decorated on Si nanowires and its correlation with the photoluminescence spectrum10.1002/jrs.4704 ↗