Influence of film thickness of Ti coating on bonding quality of glass with PET
Source abstract
Abstract
Transmission laser bonding of dissimilar and biocompatible materials has a potential application in biomedical implants. The reliability of wafer bonding between polyethylene therephthalate and glass with Ti coating is quite dependent on the surface condition of Ti film. Ti coatings were deposited on glass substrates using radio frequency magnetron sputtering. Ti coatings with different thicknesses between 60 and 150 nm showed varying surface morphology. The effect of film thickness of Ti coating on bonding quality was studied by optical profilometer and true colour confocal microscopy for materials. X-ray photoelectron spectroscopy (XPS) was used to study the bonding mechanism by evaluating the formation of chemical bond during laser bonding process. The XPS results give evidence for the formation of Ti–C and Ti–O bonds in the sharp interfacial region. Experimental results show that the film thickness of Ti coating has a significant impact on bonding quality.
Source: crossref · Quality: baseline
Research context
OpenAlex topics: Additive Manufacturing and 3D Printing Technologies · 3D IC and TSV technologies · Laser Material Processing Techniques
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
School of Mechanical Engineering Jiangsu University, Zhenjiang 212013, China
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