journal article·1998-01

Adhesion mechanism of copper films deposited by magnetron sputtering on polyamide composites

V. Legois, M. Aucouturier, E. Ollivier, E. Darque-Darque, P. Macheto

Surface Engineering· Volume 14· Issue 3
Publisher page

Abstract

This paper presents a study of the interface between Cu and a glass fibre reinforced PAMXD 6 polymer. Substrate surface chemistry was characterised before metallisation by spectroscopic techniques including Fourier transform infrared and X-ray photoelectron spectroscopy (XPS). Chemical bonding of Cu layers (20 nm to 2 11mthick) to the polymer was investigated by XPS (depth profiling, argon ion bombardment) and secondary ion mass spectrometry. The results showed that Cu reacts with the polymer, leading to the formation of a Cu-O-C like interfacial compound, and illustrated the influence of the evaporation pressure and temperature parameters on the interfacial structure and final quality of the film. The adhesion strength of the coating, obtained by z axis tensile tests (studs bonded to the PAMXD 6 with an epoxy glue), confirmed the interpretation of the analyses.
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Research context

OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Integrated Circuits and Semiconductor Failure Analysis · Copper Interconnects and Reliability

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Universite Paris-Sud, Laboratoire de Metallurgie (URA CNRS 1107), F-91405 Orsay, France, Dr Ollivier is with Aerospatiale, Centre Commun des Recherches BP 76, F-92152 Suresnes, France, Dr Darque-Ceretti is at the Ecole des Mines, CEMEF (URA CNRS 1374) BP 207, F-06904 Sophia-Antipolis, France, and Dr Macheto is with Aerospatiale, Centre de Chiitillon BP 84, F-92322 Chiitil1on, France.

References (12)

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