DLC (H) coated 13Cr SMSS by high-pulsed power CVD technique

Hydrogenated diamond-like carbon (DLC: H) films were successfully fabricated on the surface of 13Cr super martensitic stainless steel by high-pulsed power chemical vapour deposition. The mechanical and tribological properties of the films related to the substrate bias voltages were investigated. The results showed that the surface hardness and tribological properties of the substrate after DLC film deposition were improved. The DLC films became dense, the grain size and roughness reduced, and the deposition rates increased as the bias voltage increased. In addition, the dense DLC films directly led to high nanohardness and elastic modulus. The H content decreased with an increase in the bias voltage, which may be the primary reason for nanohardness and modulus enhancement. Due to the relatively high H/E* and H2/E*3 ratios of films corresponded to high elastic strain and plastic deformation resistances reduced the wear loss, and the localized graphitization on the surface provided solid lubrication.