Microfabrication of MEMS Cantilevers for Mechanically Detected High-Frequency ESR Measurement

We fabricated prototype cantilevers for mechanically detected high-frequency ESR measurement. Cantilevers are fabricated from silicon-on-insulator (SOI) wafers using standard MEMS techniques such as lithography, wet etching, and plasma etching. Using commercial SOI wafers, fabrication cost and the number of processes can be substantially reduced. In this study, three types of cantilevers, designed for capacitive and optical detec-tion, are shown. Capacitive type with lateral dimensions of 3.5 × 1.6 mm2 is aimed for low spin concentration sample. On the other hand, optical detection type with lateral dimensions of 50 × 200 µm2 is developed for high-sensitive detection of tiny samples such as newly synthesized microcrystals.