Structure and mechanical properties of a-C/(AlCrWTaTiNb)C x N y composite films
Source abstract
Abstract
a-C/(AlCrWTaTiNb)C x N y composite films are deposited by a magnetron sputtering technique using a carbon and mosaic target. The effect of carbon target power on chemical composition, morphology, microstructure and mechanical properties of a-C/(AlCrWTaTiNb)C x N y composite films is investigated. It is found that a multi-element nitride (AlCrWTaTiNb)N x film prepared without the carbon target demonstrates a triangle shape morphology with two-phase face-centred cubic structure (FCC). The crystallographic structure of the composite films changes into single-phase FCC and the morphology into granular when the carbon target power is in the range of 50–150 W. The preferred orientation of the composited films changes from (220) without the carbon target to (111) introducing carbon atoms. The maximum of micro-hardness and elastic modulus of a-C/(AlCrWTaTiNb)C x N y composite films deposited at 100 W carbon target power are 23 and 290 GPa, respectively. A corresponding H 3 / E 2 value reflecting film frictional characteristics also reaches a maximum of 0·147.
Source: crossref · Quality: baseline
Research context
OpenAlex topics: Metal and Thin Film Mechanics · Boron and Carbon Nanomaterials Research · Advanced materials and composites
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Key Laboratory for Materials Modification by Laser, Ion and Electron Beans, Ministry of Education, School of Materials Science and Engineering, Dalian University of Technology, Dalian 116024, China
School of Physics and Materials Engineering, Dalian Nationalities University, Dalian 116600, China
State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, Shaanxi 710049, China
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