Advanced vacuum arc metal ion implantation systems
Bibliographic record
Abstract
No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.
Source: Not provided · Quality: missing
Research context
OpenAlex topics: Vacuum and Plasma Arcs · Metal and Thin Film Mechanics · Advanced materials and composites
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (14)
Show source-provided references
1. Brown · Rev. Sci. Instrum. · 1994 · 65 · 306110.1063/1.1144756 ↗
2. Tolopa · Rev. Sci. Instrum. · 1994 · 65 · 313410.1063/1.1144767 ↗
3. MacGill · Rev. Sci. Instrum. · 1996 · 67 · 121010.1063/1.1146734 ↗
4. Brown · J. Vac. Sci. Technol. A · 1993 · 11 · 148010.1116/1.578688 ↗
5. Oks · Rev. Sci. Instrum. · 1996 · 67 · 121310.1063/1.1146735 ↗
6. Ryabchikov · Rev. Sci. Instrum. · 1994 · 65 · 312610.1063/1.1144766 ↗
7. Ryabchikov · Surf. Coat. Technol. · 1997 · 96 · 910.1016/S0257-8972(97)00091-1 ↗
8. Treglio · Surf. Coat. Technol. · 1994 · 65 · 18410.1016/S0257-8972(94)80029-4 ↗
9. Brown · Appl. Phys. Lett. · 1985 · 47 · 35810.1063/1.96163 ↗
10. Treglio · Nucl. Instrum. Methods B · 1989 · 40–41 · 56710.1016/0168-583X(89)91047-1 ↗
11. Gehman · Surf. Coat. Technol. · 1990 · 41 · 38910.1016/0257-8972(90)90149-7 ↗
12. Treglio · Surf. Coat. Technol. · 1992 · 51 · 54610.1016/0257-8972(92)90296-M ↗
13. Treglio · Surf. Coat. Technol. · 1993 · 62 · 43810.1016/0257-8972(93)90280-2 ↗
14. Forrester · 1988