Various Kinds of Pulsed Ultraviolet Laser Micromachinings Using a Five Axis Microstage

In this paper, various kinds of laser micromachinings using a pulsed ultra violet laser are reported. Procedures for three dimensional axis alignments between the laser beam axis and the axes of the microstage were established, which determines the accuracy of machining. Various types of micromachining are described ranging from fundamental machining of "cutting", "grinding" and "engraving" to complex structures such as micro globe and rotating micro windmill.