Cavitation Bubble Dynamics during Laser Wet Etching of Transparent Sapphire Substrates by 1064 nm Laser Irradiation
Source abstract
Abstract
Laser induced backside wet etching (LIBWE) has shown to be a promising method to process transparent sapphire substrates. However, the etching rates of the conventional LIBWE are not high enough.
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Laser Material Processing Techniques · Advanced Surface Polishing Techniques · Additive Manufacturing Materials and Processes
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References
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