Microgratings fabricated with laser-induced plasma-assisted deposition and laser subtractive patterning
Source abstract
Abstract
Laser-induced plasma-assisted deposition (LIPAD) is an efficient and low-cost method for processing thin films on transparent substrates, but it is difficult to control in terms of edge evenness, chemical composition homogeneity, and geometric precision. Here, a donor target of stainless steel 316 is used in the LIPAD process to fabricate a homogenous thin film on a glass plate. The effects of laser parameters on the structural and chemical characteristics of the films are systematically investigated. The experimental results show that the density of spherical particles reduces and the particle size shrinks as laser scanning distance increases. The influence of laser scanning distance on the chemical structures of LIPAD films is studied by Raman spectroscopy and x-ray diffraction. Microgratings with precisely defined size are fabricated from the LIPAD thin films by a laser subtractive patterning step, and grating constants retrieved from the optical diffraction experiment match well with the measured strip spacing, envisioning the feasibility of LIPAD in efficient production of microgratings.
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Research context
OpenAlex topics: Tribology and Lubrication Engineering · Adhesion, Friction, and Surface Interactions · Laser Material Processing Techniques
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
College of Mechanical Engineering, Zhejiang University of Technology 1 , Hangzhou 310023,
Institute of Laser Advanced Manufacturing, Zhejiang University of Technology 2 , Hangzhou 310023,
Collaborative Innovation Center of High-End Laser Manufacturing Equipment, Zhejiang University of Technology 3 , Hangzhou 310023,
International Science and Technology Cooperation Base on Laser Green Manufacturing, Zhejiang Province, Zhejiang University of Technology 4 , Hangzhou 310023,
Funding
The National Key Research and Development Program of China · The National Natural Science Foundation of China · Zhejiang Provincial Natural Science Foundation of China · Fundamental Research Funds for the Provincial Universities of Zhejiang · The "Pioneer" and "Leading Goose" R&D Program of Zhejiang
References (23)
Show source-provided references
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