journal article·1996-12

Linear arc discharge (LAD): a new type of hollow cathode plasma source

H. Baránková, L. Bárdoš, C. Nender, S. Berg

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Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

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Research context

OpenAlex topics: Metal and Thin Film Mechanics · Plasma Diagnostics and Applications · Diamond and Carbon-based Materials Research

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References (15)

Show source-provided references
1. Bárdoš · 1993 · 98
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3. Baránková · Vacuum · 1995 · 46 · 143310.1016/0042-207X(95)00166-2 ↗
4. Baránková · Appl. Phys. Lett. · 1995 · 67 · 152110.1063/1.114479 ↗
5. Paper B4.06 Int. Conf. Metal. Coat. Thin Films-ICMCTF 94, April 25–29, 199410.1016/0257-8972(94)02351-4 ↗
6. Bárdoš · Appl. Phys. Lett. · 1989 · 55 · 161510.1063/1.102215 ↗
7. Bárdoš · J. Vac. Sci. Technol. · 1993 · A 11 · 148610.1116/1.578689 ↗
8. Bárdoš · J. Electrochem. Soc. · 1994 · 141 · 37410.1149/1.2054734 ↗
9. Barklund · J. Vac. Sci. Technol. · 1991 · A9 · 105510.1116/1.577576 ↗
10. Paper G6.04 Int. Conf. Metal. Coat. Thin Films-ICMCTF 95, April 24–28, 199510.1016/02578-9729(50)25057- ↗
11. Tanaka · Rev. Sci. Instrum. · 1983 · 54 · 110410.1063/1.1137532 ↗
12. Okuno · Rev. Sci. Instrum. · 1992 · 63 · 372510.1063/1.1143604 ↗
13. L. Bárdoš and H. Baránková, Swedish Patent No.94 03988-0, PCT/SE95/01248.
14. Baránková · J. Electrochem. Soc. · 1995 · 142 · 88310.1149/1.2048552 ↗
15. Paper B6.04 Int. Conf. Metal. Coat. Thin Films-ICMCTF 95