Direct power coupling into a waveguide cavity plasma source
Bibliographic record
Abstract
No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.
Source: Not provided · Quality: missing
Research context
OpenAlex topics: Plasma Diagnostics and Applications · Particle accelerators and beam dynamics · Metal and Thin Film Mechanics
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (12)
Show source-provided references
1. Hopwood · J. Vac. Sci. Technol. A · 1990 · 8 · 310310.1116/1.576592 ↗
2. Chou · J. Vac. Sci. Technol. A · 1987 · 5 · 132110.1116/1.574761 ↗
3. Paraszczak · 1993
4. Korzec · Plasma Sources Sci. Technol. · 1996 · 5 · 21610.1088/0963-0252/5/2/015 ↗
5. Fehsenfeld · Rev. Sci. Instrum. · 1965 · 36 · 29410.1063/1.1719557 ↗
6. Mak · J. Vac. Sci. Technol. A · 1996 · 14 · 189410.1116/1.580356 ↗
7. Meiners · Rev. Sci. Instrum. · 1986 · 57 · 16410.1063/1.1138961 ↗
8. Brockhaus · Plasma Sources Sci. Technol. · 1994 · 3 · 53910.1088/0963-0252/3/4/011 ↗
9. Engen · IEEE Trans. Microwave Theory Tech. · 1977 · MTT-25 · 107510.1109/TMTT.1977.1129277 ↗
10. Janzen · 1992 · 92
11. Janzen · 1992 · 58
12. Golombek · 1978