journal article·2005-05-01

Numerical simulation of femtosecond laser interaction with silicon

Hyungson Ki, Jyoti Mazumder

Journal of Laser Applications· Volume 17· Issue 2
Publisher page

Abstract

A numerical model for simulating femtosecond laser interaction with silicon is presented. This model simulates laser beam propagation by directly solving Maxwell’s equations using the finite-difference time-domain method, so that complete electromagnetic nature of a laser beam is simulated accurately. Accurate computation of laser beam passage ensures realistic heat generation pattern in the target material. The two-temperature model has been adopted to simulate the energy transport of electrons and lattices. This study reveals interesting results regarding thermal energy generation and complex laser beam passage in the silicon target. The temperature histories of electrons and lattices are presented.
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Research context

OpenAlex topics: Laser Material Processing Techniques · Advanced Optical Sensing Technologies · Laser-Plasma Interactions and Diagnostics

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Mechanical Engineering Department, Michigan State University, East Lansing, Michigan 48824-1226

Center for Laser Aided Intelligent Manufacturing, University of Michigan, Ann Arbor, Michigan 48109-2125

References (26)

Show source-provided references
1. Compression of amplified chirped optical pulses10.1016/0030-4018(85)90120-8 ↗
2. Laser ablation and micromachining with ultrashort laser pulses10.1109/3.631270 ↗
3. Delayed phase explosion during high-power nanosecond laser ablation of silicon10.1063/1.1473862 ↗
4. Surface charging and impulsive ion ejection during ultrashort pulsed laser ablation10.1103/PhysRevLett.88.097603 ↗
5. Critical-point phase separation in laser ablation of conductors10.1103/PhysRevLett.86.2573 ↗
6. Simulation of phase transitions induced in gallium arsenide by combined laser radiation10.1134/1.1340887 ↗
7. Pulsed laser ablation of solids: transition from normal vaporization to phase explosion10.1007/s003390000686 ↗
8. Time-of-flight and emission spectroscopy study of femtosecond laser ablation of titanium10.1063/1.1360696 ↗
9. Simulation of the melting and crystallization processes in monocrystalline silicon exposed to nanosecond laser radiation10.1134/1.1307010 ↗
10. Experimental and numerical investigation of heat transfer and phase change phenomena during excimer laser interaction with nickel10.1016/S0017-9310(98)00272-5 ↗
11. On the theory of ultrashort laser pulse interaction with a metal10.1117/12.271674 ↗
12. Laser induced avalanche ionization and electron-lattice heating of silicon with intense near IR femtosecond pulses
13. Laser-induced damage in dielectrics with nanosecond to subpicosecond pulses10.1103/PhysRevLett.74.2248 ↗
14. Fokker–Planck calculations with ionization dynamics of short-pulse laser-solid interactions10.1103/PhysRevLett.74.924 ↗
15. Melting and diffusion under nanosecond laser-pulse10.1016/0169-4332(95)00076-3 ↗
16. Gas dynamics and radiation heat transfer in the vapor plume produced by pulsed laser irradiation of aluminum10.1063/1.361436 ↗
17. Computational study of heat-transfer and gas-dynamics in the pulsed-laser evaporation of metals10.1063/1.359817 ↗
18. Optimization of laser parameters for ultrashort-pulse laser recovery of stiction-failed microstructures10.1080/104077899274688 ↗
19. Modelling of high-density laser-material interaction using fast level set method10.1088/0022-3727/34/3/320 ↗
20. Multiple reflection and its influence on keyhole evolution10.2351/1.1449885 ↗
21. Numerical solution of initial boundary value problems involving Maxwells equations in isotropic media10.1109/TAP.1966.1138693 ↗
22. A perfectly matched layer for the absorption of electromagnetic-waves10.1006/jcph.1994.1159 ↗
23. PML-FDTD in cylindrical and spherical grids10.1109/75.622542 ↗
24. A 3D perfectly matched medium from modified Maxwells equations with stretched coordinates10.1002/mop.4650071304 ↗
25. Laser-solid interaction in the femtosecond time regime
26. Relaxation between electrons and the crystalline lattice