journal article·1999-02

Mechanical properties of carbon nitride thin films prepared by ion beam assisted filtered cathodic vacuum arc deposition

C Spaeth, M Kühn, T Chudoba, F Richter

Surface and Coatings Technology· Volume 112· Issue 1-3
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Abstract

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Research context

OpenAlex topics: Diamond and Carbon-based Materials Research · Metal and Thin Film Mechanics · Advanced materials and composites

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