Thermal stability of oxygen vacancy stabilized zirconia (OVSZ) thin films
Source abstract
Abstract
Abstract Thermal stability of reactive magnetron sputter deposited oxygen vacancy stabilized cubic zirconia (OVSZ) thin films containing 16 and 3 at.% oxygen vacancies is reported. Temperature-resolved grazing incidence X-ray diffraction (TR-GIXRD) measurements (200–900 °C) in air and nitrogen atmosphere were performed. TR-GIXRD data show that the deposited films are stable up to 750 °C irrespective of the annealing atmosphere or the oxygen vacancy concentration. However, above 750 °C a fraction of zirconia transforms from cubic to monoclinic structure. This structural transition is explained by the compressive stresses, generated as a result of discrepancy in film-substrate thermal expansion coefficients. Thermal cycling of the deposited OVSZ thin films is also performed at 700 °C and show that films retain their initial cubic structure.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: High-Temperature Coating Behaviors · Advanced ceramic materials synthesis · Advancements in Solid Oxide Fuel Cells
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (21)
Show source-provided references
1. Systems approaches to materials design: past, present, and future10.1146/annurev-matsci-070218-125955 ↗
2. G.B. Olson, Computational design of hierarchically structured materials, Science (80-. ). 277 (1997) 1237–1242. doi:https://doi.org/10.1126/science.277.5330.1237.10.1126/science.277.5330.1237 ↗
3. The O-Zr (oxygen-zirconium) system10.1007/BF02881546 ↗
4. New material concepts for the next generation of plasma-sprayed thermal barrier coatings10.1007/s11666-004-0052-4 ↗
5. Thermal barrier coating materials10.1016/S1369-7021(05)70934-2 ↗
6. Mechanisms of room temperature metastable tetragonal phase stabilisation in zirconia10.1179/174328005X14267 ↗
7. Stabilized zirconia as a structural ceramic: an overview10.1016/j.dental.2007.05.005 ↗
8. Oxygen vacancy stabilized zirconia (OVSZ); a joint experimental and theoretical study10.1016/j.scriptamat.2016.06.025 ↗
9. Near interface ionic transport in oxygen vacancy stabilized cubic zirconium oxide thin films10.1039/C8CP05465G ↗
10. Crystallization and residual stress formation of sol-gel-derived zirconia films10.1016/S0040-6090(97)00579-8 ↗
11. The scherrer formula for X-ray particle size determination10.1103/PhysRev.56.978 ↗
12. Influence of process parameters on the structure and the properties of ZrO 2 coatings deposited by reactive pulsed magnetron sputtering (PMS)10.1016/S0040-6090(00)01381-X ↗
13. Thermal expansion of AlN, sapphire, and silicon10.1063/1.1663432 ↗
14. N. Tranvouez, P. Steyer, A. Malchère, P. Boulet, F. Capon, J.P. Bauer, J.F. Pierson, Effect of thermal stresses formed during air annealing of amorphous lanthanum cuprate thin films deposited on silicon substrate, Coatings. 10 (2020). doi:https://doi.org/10.3390/coatings10070613.10.3390/coatings10070613 ↗
15. Generation and evolution of residual stresses in physical vapour-deposited thin films10.1016/S0042-207X(00)00475-9 ↗
16. Morrell · 1985
17. Crystal structures of zirconia phases and their inter-relation10.4028/www.scientific.net/KEM.153-154.1 ↗
18. Structure formation upon reactive direct current magnetron sputtering of transition metal oxide films10.1063/1.1777412 ↗
19. Evidence of stress-induced tetragonal-to-monoclinic phase transformation during sputter deposition of yttria-stabilized zirconia10.1557/jmr.2007.0128 ↗
20. Residual stress and phase transformation in zirconia restoration ceramics10.1002/9781118217504.ch6 ↗
21. Mapping the tetragonal to monoclinic phase transformation in zirconia core dental crowns10.1016/j.dental.2011.09.004 ↗