journal article·2023-08-01

Application of ultrafast laser beam shaping in micro-optical elements

Zhihao Qu, Shufeng Sun, Jin Wang, Mingming Jiang, Fengyun Zhang, Xi Wang, Jing Shao, Guanglei Liang, Pingping Wang

Journal of Laser Applications· Volume 35· Issue 3
Publisher page

Abstract

The manufacturing and application of micro-optical elements are constantly evolving toward miniaturization, integration, and intelligence and have important applications in holographic displays, optical imaging, laser processing, information processing, and other fields. Ultrafast lasers, with their ultrashort pulse width, extremely high peak power, high processing resolution, small thermal influence zone, and nondestructive material processing advantages, have become an important processing method for preparing micro-optical elements. However, the laser output from the laser usually has a Gaussian distribution, with limitations in spatial and temporal energy and shape distribution, making it difficult to meet the requirements of processing efficiency and quality, which poses new challenges to ultrafast laser manufacturing technology. Therefore, by shaping the ultrafast laser beam and regulating nonlinear optical effects, the optimization and adjustment of the beam shape can be achieved, thus improving the quality and efficiency of micro-optical element processing. Ultrafast laser beam shaping technology provides a new method for the manufacture of micro-optical elements. This article first introduces the commonly used manufacturing methods for micro-optical elements. Second, from the perspective of the temporal domain, spatial domain, and spatiotemporal domain, the basic principles, methods, and existing problems of ultrafast laser beam shaping are summarized. Then, the application of these shaping technologies in the preparation of micro-optical elements is elaborated. Finally, the challenges and future development prospects of ultrafast laser beam shaping technology are discussed.
Source: crossref · Quality: baseline

Research context

OpenAlex topics: Laser Material Processing Techniques · Advanced Optical Imaging Technologies · Nonlinear Optical Materials Studies

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

School of Mechanical and Automotive Engineering, Qingdao University of Technology 1 , Qingdao 266520, China

Intelligent Manufacturing College of Qingdao Huanghai University, Qingdao Huanghai University 2 , Qingdao 266427, China

Funding

The National Natural Science Foundation of China · The 111 Project of China · The Key Research and Development Plan of Shandong Province · The Major Basic Research Programme of the Natural Science Foundation of Shandong Province, China · Qingdao West Coast New Area Science and Technology Project · Qingdao Weat Coast New Area 2020 annual Science and Technology Source Innovation Project

References (100+)

Show source-provided references
1. Application of ultrafast laser micromachining technology
2. The dynamics of small molecules in intense laser fields10.1088/0034-4885/67/5/R01 ↗
3. Tunneling ionization of atoms and molecules in femtosecond-laser fields and its applications10.3788/CJL201946.0508017 ↗
4. Rydberg state excitation of atoms and molecules in an ultrafast intense laser field10.7498/aps.71.20221258 ↗
5. Hybrid femtosecond laser three-dimensional micro- and nanoprocessing: A review10.1088/2631-7990/ab0eda ↗
6. Research progress on femtosecond laser fabrication of nonlinear photonic crystals10.3788/CJL221061 ↗
7. Applications of ultrafast wavefront rotation in highly nonlinear optics10.1088/0953-4075/47/12/124004 ↗
8. Molecular-dynamics study of multi-pulsed ultrafast laser interaction with copper10.14743/apem2021.4.413 ↗
9. Tunable laser optics: Applications to optics and quantum optics10.1016/j.pquantelec.2013.09.001 ↗
10. Applications of ultrafast lasers in microfabrication10.2961/jlmn.2013.02.0001 ↗
11. One-step fabrication of achromatic spherical microlens array on enzyme etched gelatin film10.1016/j.mee.2008.12.006 ↗
12. Nanoscale focused electron beam induced etching of nickel using a liquid reactant10.1088/1361-6528/ab9fb4 ↗
13. Layer etching of mica nanosheets using a focused electron beam10.35848/1882-0786/abb385 ↗
14. Waveguide in Tm3+-doped chalcogenide glass fabricated by femtosecond laser direct writing10.1109/LPT.2014.2365619 ↗
15. Surface modification of carbon fiber cloth by femtosecond laser direct writing technology10.1016/j.matlet.2022.132483 ↗
16. Fabrication of large-scale multilevel phase-type Fresnel zone plate arrays by femtosecond laser direct writing10.1016/j.optcom.2015.08.039 ↗
17. Metal assisted focused-ion beam nanopatterning10.1088/0957-4484/27/36/36LT01 ↗
18. Optical examination of high contrast grating fabricated focused-ion beam etching10.1007/s11082-016-0544-8 ↗
19. Reactive ion etching (CF4/Ar) and ion beam etching of various glasses for diffractive optical element fabrication10.1111/ijag.12412 ↗
20. Ruthenium-assisted chemical etching of silicon: Enabling CMOS-compatible 3D semiconductor device nanofabrication10.1021/acsami.0c17011 ↗
21. Perspectives on black silicon in semiconductor manufacturing: Experimental comparison of plasma etching, MACE, and Fs-laser etching10.1109/TSM.2022.3190630 ↗
22. Freeform manufacturing of a microoptical lens array on a steep curved substrate by use of a voice coil fast tool servo10.1364/OE.19.023938 ↗
23. 2019
24. Research on focused ion beam etching of lithium niobate10.13250/j.cnki.wndz.2020.03.010 ↗
25. The principle of electron beam direct writing lithography and analysis of normal questions10.3969/j.issn.1004-4507.2020.02.011 ↗
26. Single point diamond turning and compensation for micro-lens arrays10.37188/OPE.20223007.0813 ↗
27. Optimization of diamond turning processes for CaF2 diffractive optical elements10.3788/AOS202141.2205001 ↗
28. Combined pulse laser: Reliable tool for high-quality, high-efficiency material processing10.1016/j.optlastec.2022.108209 ↗
29. Temperature effects on the geometry during the formation of microholes fabricated by femtosecond laser in PMMA10.1016/j.optlastec.2017.10.014 ↗
30. Research progress on beam homogenization and shaping technology using all-fiber structure10.3788/LOP202259.1516021 ↗
31. Femtosecond laser processing with a holographic line-shaped beam10.1364/OE.23.023185 ↗
32. Electrons dynamics control by shaping femtosecond laser pulses in micro/nanofabrication: Modeling, method, measurement, and application10.1038/lsa.2017.134 ↗
33. Initial temporal and spatial changes of the refractive index induced by focused femtosecond pulsed laser irradiation inside a glass10.1103/PhysRevB.71.024113 ↗
34. Etching rate enhancement by shaped femtosecond pulse train electron dynamics control for microchannels fabrication in fused silica glass10.1364/OL.38.004613 ↗
35. Polarization-independent etching of fused silica based on electrons dynamics control by shaped femtosecond pulse trains for microchannel fabrication10.1364/OL.39.005240 ↗
36. Full characterization of a phase-locked DUV double pulse generated in an all-reflective shaping setup working under grazing incidence in a broad spectral range10.1007/s00340-021-07722-6 ↗
37. Control of supercontinuum generation from filamentation of shaped femtosecond laser pulses10.7498/aps.69.20191438 ↗
38. A concept for multiterawatt fibre lasers based on coherent pulse stacking in passive cavities10.1038/lsa.2014.92 ↗
39. Light propagation with phase discontinuities: Generalized laws of reflection and refraction10.1126/science.1210713 ↗
40. Advances in exploiting the degrees of freedom in nanostructured metasurface design: From 1 to 3 to more10.1515/nanoph-2020-0127 ↗
41. Femtosecond laser pulse shaping technology and its applications10.7498/aps.63.184201 ↗
42. Advancing Fourier: Space-time concepts in ultrafast optics, imaging, and photonic neural networks10.1364/JOSAA.36.000C69 ↗
43. II shaping and analysis of picosecond light pulses10.1016/S0079-6638(08)70277-4 ↗
44. Femtosecond optical pulse shaping and processing10.1016/0079-6727(94)00013-O ↗
45. Wavelength agile nonmechanical laser beam steering from Fresnel zone plates imprinted on a liquid crystal spatial light modulator10.1117/1.OE.55.9.097103 ↗
46. Ultrafast optical pulse shaping: A tutorial review10.1016/j.optcom.2011.03.084 ↗
47. Femtosecond pulse shaping with space-to-time conversion based on planar optics10.1016/j.ijleo.2006.03.021 ↗
48. Simple and robust generation of ultrafast laser pulse trains using polarization-independent parallel-aligned thin films10.1016/j.optlastec.2017.11.003 ↗
49. Numerical simulation of an adaptive beam-shaping technique using a phase grating overlapped via a spatial light modulator for precision square–flat-top beam10.1007/s00339-020-03496-4 ↗
50. Variable holographic femtosecond laser processing by use of spatial light modulator10.1063/1.1992668 ↗
51. Delay line coherent pulse stacking10.1364/OL.42.004829 ↗
52. Coherent pulse stacking amplification using low-finesse Gires-Tournois interferometers10.1364/OE.23.007442 ↗
54. Multiplexed coherent pulse stacking of 27 pulses in a 4 + 1 GTI resonator sequence10.1364/ASSL.2016.AM4A.6 ↗
55. Anomalous wave control by an adaptive elastic metasurface-shunted with negative capacitance circuit10.1016/j.jsv.2022.116782 ↗
56. Fundamentals and applications of metasurfaces10.1002/smtd.201600064 ↗
57. Ultrafast optical pulse shaping using dielectric metasurfaces10.1126/science.aav9632 ↗
58. Shaping polarization within an ultrafast laser pulse using dielectric metasurfaces10.1364/OPTICA.471040 ↗
59. Control of femtosecond pulsed laser ablation and deposition by temporal pulse shaping10.1016/j.optlastec.2015.09.020 ↗
60. Controllable photon energy deposition efficiency in laser processing of fused silica by temporally shaped femtosecond pulse: Experimental and theoretical study10.1016/j.optlastec.2020.106265 ↗
61. Ripple suppression of third-order dispersion by using graded index one-dimensional photonic crystals10.1080/09500340.2019.1595201 ↗
62. Real-time adaptive ultrashort pulse compressor for dynamic group delay dispersion compensation10.1364/OE.464353 ↗
63. Fabrication of micro-optical elements using electrons dynamics controlled temporally/spatially shaped femtosecond laser10.3788/CJL202249.1002501 ↗
64. Diffractive optical element for noise-reduced beam shaping of multi-array point light source10.3807/COPP.2021.5.5.506 ↗
65. Optical design of Gaussian beam shaping system10.3788/OPE.20111907.1464 ↗
66. Integrated double-sided random microlens array used for laser beam homogenization10.3390/mi12060673 ↗
67. Massively parallel femtosecond laser processing10.1364/OE.24.018513 ↗
68. Phase-reversal zone-plates, and diffraction-telescopes10.1080/14786449808621159 ↗
69. 2020
70. Generation of uniform-intensity light beams with controllable spatial shapes10.1016/j.optcom.2020.126226 ↗
71. Design of diffractive optical elements with continuous phase distribution based on machine learning10.3788/AOS221385 ↗
72. Design and preparation of diffraction optical element in dual lens system10.3788/CJL20103708.1972 ↗
73. Arbitrary micropatterning method in femtosecond laser microprocessing using diffractive optical elements10.1364/OPEX.12.001908 ↗
74. Épreuves réversibles donnant la sensation du relief10.1051/jphystap:019080070082100 ↗
76. Broadband and wide-angle antireflective subwavelength microstructures on zinc sulfide fabricated by femtosecond laser parallel multi-beam10.1364/OE.26.034016 ↗
77. Electrons dynamics control micro-hole drilling using temporally/spatially shaped femtosecond laser10.12086/oee.2022.210389 ↗
78. Fabrication of microchannels in fused silica using femtosecond Bessel beams10.1063/1.4929649 ↗
79. Generation of Bessel beams using a 4-f spatial filtering system10.1119/1.3033743 ↗
80. Individually controlled multi-focus laser processing for two-photon polymerization10.1117/12.842117 ↗
81. Multi imaging-based beam shaping for ultrafast laser-material processing using spatial light modulators10.1016/j.optlaseng.2018.09.002 ↗
82. Diffraction-free beams10.1103/PhysRevLett.58.1499 ↗
83. Harnessing the power of Bessel beam for biomedical microscopy (invited)10.3788/gzxb20225108.085150 ↗
84. Complex non-diffraction beams generated using binary computational holography10.37188/CO.2021-0061 ↗
85. Mathieu functions, a visual approach10.1119/1.1522698 ↗
86. Femtosecond Mathieu beams for rapid controllable fabrication of complex microcages and application in trapping micro objects10.1021/acsnano.9b00893 ↗
87. 2022
88. Vector vortex beam generation with a single plasmonic metasurface10.1021/acsphotonics.6b00392 ↗
89. Nonspreading wave packets10.1119/1.11855 ↗
90. Accelerating finite energy airy beams10.1364/OL.32.000979 ↗
91. Beam shaping via photopatterned liquid crystals10.1080/02678292.2016.1191685 ↗
92. Autofocusing airy beams generated by all-dielectric metasurface for visible light10.1364/OE.25.009285 ↗
93. Metasurface freeform nanophotonics10.1038/s41598-017-01908-9 ↗
94. Planar photonics with metasurfaces10.1126/science.1232009 ↗
95. Flat optics with designer metasurfaces10.1038/nmat3839 ↗
96. Aberration-free ultrathin flat lenses and axicons at telecom wavelengths based on plasmonic metasurfaces10.1021/nl302516v ↗
97. Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission10.1038/nnano.2015.186 ↗
98. 2014
99. Functionalization of freeform curved surfaces by shaped femtosecond laser pulses in the propagation axis10.1364/OE.418663 ↗
100. Three dimensional micromachining inside a transparent material by single pulse femtosecond laser through a hologram10.1063/1.2965451 ↗