Optical diagnostics of d.c. and r.f. argon magnetron discharges
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Research context
OpenAlex topics: Plasma Diagnostics and Applications · Metal and Thin Film Mechanics · Atomic and Molecular Physics
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References (7)
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3. Guimaraes · Plasma Sources Sci. Technol. · 1993 · 2 · 13810.1088/0963-0252/2/3/002 ↗
4. Ferreira · J. Appl. Phys. · 1983 · 54 · 226110.1063/1.332380 ↗
5. Ferreira · J. Appl. Phys. · 1985 · 57 · 8210.1063/1.335400 ↗
6. Mitchell · 1977
7. Pantel · Beitr. Plasmaphys. · 1983 · 23 · 56110.1002/ctpp.19830230603 ↗