Review of laser nanomachining

Lasers are widely used for macro- and micromachining applications in numerous industries such as automotive, electronics, and medical manufacturing. However, there are many challenges encountered in the utilization of lasers for nanomachining. The most critical requirement is that the diffraction limit of laser light must be overcome. With recent developments in laser technology in terms of short-wavelength and ultrashort pulse width, there is a wealth of opportunities to beat the diffraction limit for nanomachining of structures, devices, and materials. In this review paper, first the state-of-the-art lasers are examined from the perspective of the requirements of nanomachining. Second, a set of both serial and parallel types of laser-based, “top-down” nanomachining methods is described. Third, preliminary results obtained in our laboratory of the most recent, novel approach involving surface plasmon polaritons for the potential of massively parallel nanomachining are presented. Finally, the potential of lasers for cost-effective nanomanufacturing is assessed.