journal article·1989-12

Synthesis of BN films by the plasma CVD with various solids: BH3NH3, H3BO3 and NaBH4

H. Saitoh, T. Hirose, Y. Hirotsu, Y. Ichinose

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Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

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Research context

OpenAlex topics: Boron and Carbon Nanomaterials Research · Metal and Thin Film Mechanics · Diamond and Carbon-based Materials Research

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References (10)

Show source-provided references
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6. Zhou · Sinku · 1985 · 28 · 581
7. Shimokawa · Proc. 9th Symp. on ISIAT '85 · 1985 · 467
8. Miyamoto · Jpn. J. Appl. Phys. · 1983 · 22 · L21610.1143/JJAP.22.L216 ↗
9. Halverson · J. Vac. Sci. Technol. · 1985 · A3 · 214110.1116/1.573268 ↗
10. Ichinose · Proc. 11th Symp. on ISIAT '87 · 1987 · 2440