Imaging of atomic oxygen in a microwave excited oxygen plasma with two-dimensional optical emission spectroscopy
Bibliographic record
Abstract
No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.
Source: Not provided · Quality: missing
Research context
OpenAlex topics: Laser Design and Applications · Spectroscopy and Laser Applications · Plasma Diagnostics and Applications
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (21)
Show source-provided references
1. Normand · Mater. Sci. Eng. · 1991 · A139 · 10310.1016/0921-5093(91)90603-K ↗
2. Sprang · Surf. Coat. Technol. · 1995 · 74, 75 · 68910.1016/0257-8972(95)08340-5 ↗
3. A. Ui, Y. Nakamura, M. Wong, I. Matsui, Conf. Proc. 11th Int. conference on gas discharges GD, 1995 p. 402.
4. Collart · J. Appl. Phys. · 1995 · 78 · 4710.1063/1.360630 ↗
5. Korzec · Plasma Sources Sci. Technol. · 1996 · 5 · 21610.1088/0963-0252/5/2/015 ↗
6. Werner · Plasma Sources Sci. Technol. · 1994 · 3 · 47310.1088/0963-0252/3/4/004 ↗
7. Dreyfus · Pure Appl. Chem. · 1985 · 5 · 126510.1351/pac198557091265 ↗
8. Hancock · Surf. Coat. Technol. · 1995 · 74, 75 · 1010.1016/0257-8972(95)08343-X ↗
9. Collart · J. Appl. Phys. · 1991 · 70 · 527810.1063/1.350237 ↗
10. Bischel · Chem. Phys. Lett. · 1981 · 82 · 8510.1016/0009-2614(81)85112-3 ↗
11. Bamford · Phys. Rev. A · 1986 · 34 · 18510.1103/PhysRevA.34.185 ↗
12. Bischel · Appl. Opt. · 1986 · 25 · 121510.1364/AO.25.001215 ↗
13. Brockhaus · J. Vac. Sci. Technol. A · 1996 · 14 · 188210.1116/1.580354 ↗
14. Alden · Opt. Lett. · 1989 · 14 · 30510.1364/OL.14.000305 ↗
15. Amorim · J. Appl. Phys. · 1994 · 76 · 148710.1063/1.357723 ↗
16. Goldsmith · Appl. Opt. · 1987 · 26 · 356610.1364/AO.26.003566 ↗
17. Wysong · Opt. Lett. · 1989 · 14 · 76710.1364/OL.14.000767 ↗
18. Brockhaus · Surf. Coat. Technol. · 1995 · 74, 75 · 43110.1016/0257-8972(95)08217-4 ↗
19. Werner · J. Vac. Sci. Technol. A · 1996 · 14 · 306510.1116/1.580172 ↗
20. A. Engel, Electric Plasmas: Their Nature and Uses, Taylor and Francis, London, 1983, p. 192.
21. Trennepohl Jr · Plasma Sources Sci. Technol. · 1996 · 5 · 60710.1088/0963-0252/5/4/002 ↗