Effects of electron-focusing electric field upon enhanced glow discharge plasma ion implantation

The effects of the electron-focused electric field on enhanced glow discharge plasma ion implantation (EGDPII) are investigated and an enhancement mechanism is proposed. By using a small pointed anode and large area tabular cathode, an electric field that can focus the electrons is set up. The electrons concentrate on the pointed hollow anode and the secondary electrons play an important role in producing and sustaining the plasma.