Application of the ECR slot antenna plasma source for ion implantation
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OpenAlex topics: Plasma Diagnostics and Applications · Semiconductor materials and devices · Metal and Thin Film Mechanics
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References (35)
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21. A one-dimensional collisional model for plasma-immersion ion implantation10.1063/1.348774 ↗
22. Model for expanding sheaths and surface charging at dielectric surfaces during plasma source ion implantation10.1116/1.587364 ↗
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