Readout Electronics Scheme in CMOS Technology for Integration with Analog Outputs from Integrated Smart Sensors
Source abstract
Abstract
A digital readout electronics scheme in CMOS technology is described for integration with micro-electro-mechanical (MEM) sensors on the same chip. The readout circuit is general in nature and can be employed with a variety of analog sensors. The presented scheme in CMOS technology is fully integrable with the multiple sensor outputs either in a chain or an array format and is capable of detecting low analog output signals from a few mV to mV range. The CMOS circuit design is compatible with ±1.5V operation for low power consumption.
Source: crossref · Quality: baseline
Research context
OpenAlex topics: Advanced MEMS and NEMS Technologies · Analog and Mixed-Signal Circuit Design · Mechanical and Optical Resonators
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Department of Electrical and Computer Engineering, Louisiana State University, Baton Rouge, LA 70803,
Intel Corporation, 1900 Prairie City Road, Folsom, CA 95630
Department of Electrical and Computer Engineering, Louisiana State University, Baton Rouge, LA 70803
References (18)
Show source-provided references
1. 10.1109/16.62259410.1109/16.622594 ↗
2. Geiger, R. L. · 1990
3. George, N., 1996, “Microelectronic Test Structures for Gas Sensor Implementation using Bulk-Micromachining in CMOS Process,” M.S. thesis, Louisiana State University, Baton Rouge, LA.
4. Howe, R. T. · 1997
5. 10.1109/4.55762710.1109/4.557627 ↗
6. 10.1109/4.29770410.1109/4.297704 ↗
7. 10.1109/23.15970410.1109/23.159704 ↗
8. 10.1109/23.25664810.1109/23.256648 ↗
9. 10.1109/PROC.1982.1233110.1109/PROC.1982.12331 ↗
10. Ristic, L. · 1994
11. Srivastava, A. · 180
12. Srivastava, A. · 121
13. Stadler, S., 1997, “Integration of a Post-Fabricated Accelerometer on a Chip with Standard CMOS Circuitry Using Deep X-ray Lithography, M.S. thesis, Louisiana State University, Baton Rouge, LA.
14. Stadler, S. · 230
15. 10.1109/4.54580410.1109/4.545804 ↗
16. Wise, K. W. · 1
17. Weste, N. H. E. · 1993
18. 10.1109/16.64135510.1109/16.641355 ↗