Preparation of RuO2–YSZ nano-composite films by MOCVD

Abstract RuO 2 –yttrium stabilized zirconia (YSZ) nano-composite films were prepared by MOCVD on YSZ substrates and their electrical properties were investigated by AC impedance spectroscopy. The composite films consisted of RuO 2 and YSZ particles both several tens of nanometer in diameter. The electrical conductivity at the RuO 2 –YSZ interface increased with increasing RuO 2 content up to 20–25 vol.% RuO 2 and became constant at more than 30 vol.% RuO 2 . The emf values of the oxygen concentration cell constructed from the RuO 2 film electrode and YSZ electrolyte showed the Nernstian theoretical values at 650 °C.