Ion implantation as an industrial process
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Abstract
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Research context
OpenAlex topics: Metal and Thin Film Mechanics · Silicon and Solar Cell Technologies · Plasma Diagnostics and Applications
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References (9)
Show source-provided references
1. Dearnaley · J. Vac. Sci. Technol. A · 1985 · 3 · 268410.1116/1.572815 ↗
2. Treglio · Advanced Materials and Processes · 1989 · 49
3. Byers · 1986 · 15
4. Dearnaley · Surf. Eng. · 1986 · 2 · 21310.1179/sur.1986.2.3.213 ↗
5. Yamada · Surf. Coat. Technol. · 1992 · 51 · 51410.1016/0257-8972(92)90291-H ↗
6. Treglio · 1988 · 88 · 567
7. Brown · Surf. Coat. Technol. · 1992 · 51 · 52910.1016/0257-8972(92)90293-J ↗
8. Hirvonen · 1984 · Vol. 27 · 621
9. Grabowski · 1983 · 364