Residual stresses in the failure of W–Pt–Ag metallizations on oxidized Si
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Abstract
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Research context
OpenAlex topics: Metal and Thin Film Mechanics · Advanced materials and composites · Copper Interconnects and Reliability
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References (18)
Show source-provided references
1. Bartlett · Acta Metall. Mater. · 1991 · 39 · 157910.1016/0956-7151(91)90245-V ↗
2. Howard · Acta Metall. Mater. · 1994 · 42 · 282310.1016/0956-7151(94)90223-2 ↗
3. Tsui · Thin Solid Films · 1997 · 306 · 2310.1016/S0040-6090(97)00199-5 ↗
4. Thouless · Thin Solid Films · 1989 · 181 · 39710.1016/0040-6090(89)90508-7 ↗
5. D. Smith, Thin-Film Deposition: Principals and Practices, McGraw Hill, New York, 1995.
6. Thornton · Ann. Rev. Mater. Sci. · 1977 · 7 · 24210.1146/annurev.ms.07.080177.001323 ↗
7. Wagner · J. Vac. Sci. Technol. · 1974 · 11 · 58210.1116/1.1318073 ↗
8. Thornton · J. Vac. Sci. Technol. · 1980 · 17 · 38010.1116/1.570394 ↗
9. Thornton · J. Vac. Sci. Technol. · 1982 · 20 · 35610.1116/1.571285 ↗
10. Suhir · J. Appl. Mech. · 1988 · 55 · 14310.1115/1.3173620 ↗
11. Vinci · Ann. Rev. Mater. Sci. · 1996 · 26 · 43710.1146/annurev.ms.26.080196.002243 ↗
12. M. Ohring, The Materials Science of Thin Films, Academic Press, San Diego, 1992.10.1016/B978-0-08-051118-4.50012-8 ↗
13. Thornton · Vac. Sci. Technol. · 1982 · 20 · 35610.1116/1.571285 ↗
14. Thornton · Thin Solid Films · 1977 · 45 · 38710.1016/0040-6090(77)90277-2 ↗
15. Thornton · Thin Solid Films · 1989 · 171 · 510.1016/0040-6090(89)90030-8 ↗
16. S. Smith, Thin-Film Deposition: Principals and Practices, McGraw-Hill, New York, 1995.
17. B. Lawn, Fracture of Brittle Solids, Cambridge University Press, 2nd edn., 1993.10.1017/CBO9780511623127 ↗
18. Weibull · J. Appl. Mech. · 1957 · 18 · 29310.1115/1.4010337 ↗