journal article·2008-03

Quantitative Evaluation of CVD Diamond Coating Layer Using Rayleigh-like Waves

Sung-Duk Kwon, Hak-Joon Kim, Sung-Jin Song, Toshiyuki Takagi, Tetsuya Uchimoto, Toshihiko Abe

Publisher page

Abstract

This work aims to explore the possibility of using generalized Lamb waves for nondestructive evaluation of the bonding quality of layered substrates. For this purpose, CVD diamond specimens with different cleaning conditions are prepared. A dispersion simulation performed for layered substrates with imperfect interfaces is carried out to find out the characteristics of dispersion curves that can be used for bonding quality evaluation. Then the characteristics of dispersion curves of the fabricated specimens are experimentally determined by using an ultrasonic backward radiation measurement technique. The results obtained in the present study show that the lowest velocity mode (Rayleigh-like) of the generalized Lamb waves is sensitively affected by the bonding quality. Therefore, the Rayleigh-like Lamb waves can be applied for nondestructive evaluation of imperfect bonding quality in various layered substrates.
Source: crossref · Quality: baseline

Research context

OpenAlex topics: Ultrasonics and Acoustic Wave Propagation · Adhesion, Friction, and Surface Interactions · Advanced machining processes and optimization

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Department of Physics, Andong National University, Andong 760-749, Korea,

School of Mechanical Engineering, Sungkyunkwan University, Suwon 440-746, Korea

Institute of Fluid Science, Tohoku University, Sendai 980-8577, Japan

AIST Tohoku, National Institute of Advanced Industrial Science and Technology, Sendai 980-855, Japan

References (13)

Show source-provided references
1. 10.1016/j.diamond.2003.10.04410.1016/j.diamond.2003.10.044 ↗
2. Adler, L. · J. Appl. Phys. · 1990 · 68 · 60
3. 10.1007/BF0056622310.1007/BF00566223 ↗
4. Brekhovskikh, L.M. 1980. Waves in Layered Media, p. 62, Academic Press, New York.
5. Celis, J.P. · Surface Science · 1992 · 54 · 32210.1016/0169-4332(92)90064-5 ↗
6. 10.1016/B978-0-12-395670-5.50007-610.1016/B978-0-12-395670-5.50007-6 ↗
7. 10.1063/1.35144710.1063/1.351447 ↗
8. 10.1016/S0272-8842(00)00015-810.1016/S0272-8842(00)00015-8 ↗
9. Ko, R., Nagy, P.B. and Adler, L. 1992. In: Thompson, D.O. and Chimenti, D.E. (eds), Review of Progress in Quantitative Nondestr. Eval., 11B, p. 1976, Plenum Press, New York.
10. Kwon, S.D. · Korean Applied Physics · 1996 · 9 · 601
11. 10.1016/S0963-8695(99)00050-X10.1016/S0963-8695(99)00050-X ↗
12. 10.1143/JJAP.44.625510.1143/JJAP.44.6255 ↗
13. 10.1016/j.ultras.2006.05.05310.1016/j.ultras.2006.05.053 ↗