Vibration Control of Stiff Beams and Plates Using Structurally Integrated PZT Stack Actuators

An actuation technique suitable for controlling bending vibrations in thick beams and plates is described. This work is motivated by vibration problems encountered in manufacturing that require greater control authority than can be obtained using surface mounted PZT patches or PVDF films. Instead, PZT stack actuators mounted in material cutouts are used to induce bending moments in the host structure. Experimental results are provided for the case of a cantilevered bar and a lithography platen used in the manufacture of integrated circuits. Good coupling between the extensional motion of the actuators and the bending deformation of the host structures is illustrated, and significant increases in first mode damping are achieved in both examples using a positive position feedback compensator.