Microstructural dielectric elastomer actuator with uniaxial in-plane contraction

A micromachined dielectric elastomer actuator with uniaxial in-plane contraction was proposed. The modeling, fabrication, and testing of the actuator were carried out. When a bias voltage was applied, the resulting electrostatic force compressed the dielectric elastomer that then shrank in area due to its embedded microstructures. The proposed dielectric elastomer actuator consisted of two electrode layers, two flexible layers, and a microstructural layer. The microstructural layer possessed the grating patterns that served as the spacers to define the gap between the top and bottom flexible layers. The grating patterns also determined the direction of the in-plane contraction. When the applied electrostatic force pulled together the bottom and top flexible layers, these two layers bent inwardly and shortened the distance between the spacers. The design of the bending actuation was demonstrated utilizing the asymmetric thickness design of the flexible layers.