journal article·2025Open access

Large-size Functional Wafer Temporary Bonding and Thinning

Yixin ZHU, Zhikui YU, Qing WAN

Journal of Inorganic Materials· Volume 40· Issue 12

Abstract

DOI 10
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short

Research context

OpenAlex topics: 3D IC and TSV technologies · Additive Manufacturing and 3D Printing Technologies · Manufacturing Process and Optimization

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References

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