Preparation and Properties of Hard PZT Piezoelectric Ceramics Poled above Curie Temperature and Multilayer Actuators
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Abstract
高于居里温度极化的硬性 PZT 压电陶瓷制备及叠层驱动 器性能研究1 (1.中国科学院 上海硅酸盐研究所，中国科学院无机功能材料与器件重点实验室，上海 200050; 2. 中国科学院大 学 材料科学与光电技术学院, 北京 100049) 摘 要: 压电叠层驱动器具有低驱动电压、大位移的特点，被广泛应用于诸多领域。作为目前压电叠层驱动器中最 常使用的材料，软性锆钛酸铅(PZT)陶瓷较高的介电常数和损耗往往会导致较高的功耗和发热量，进而影响驱动器 的疲劳特性和稳定性。为了制备出低发热、适用于压电叠层驱动器应用的压电陶瓷，本工作选取 Mn 掺杂(摩尔分 数)的 Pb(Sb1/2Nb1/2)0.02Zr0.51Ti0.47O3-0.6%MnCO3(PSN-PZT)硬性压电陶瓷作为基体材料。掺入一定含量的Li2CO3 烧 结助剂降低陶瓷的烧结温度，并采用高于居里温度极化工艺进一步提升陶瓷的电学性能。最后采用该材料利用流 延工艺制备出压电叠层驱动器并与相同工艺制备的 Pb(Mg1/3Nb2/3)0.25(Ti0.48Zr0.52)0.75O3(PMN-PZT)驱动器比较。结果如下：Li2CO3 通过引入液相烧结的方式将 PSN-PZT 陶瓷烧结温度降低至 1050 ℃。高于居里温度极化 PSN-PZT 陶 瓷的压电系数(d33)和 2 kV/mm 电场下的单极应变(Strain)分别为 388 pC/N 和 0.13%。在 200 Hz 下，
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References (36)
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