Structure Properties of Mg_xZn_(1-x)O Films

Mg_xZn_(1-x)O films (x=0.23) were prepared on silicon substrates by radio frequency magnetron sputtering at 80癈. The structure properties of MgxZn1-xO films were studied by using XRD, HRTEM, Raman spectra and AFM. The analyses of XRD and HRTEM indicate that the MgxZn1-xO films have hexagonal wurtzite single-phase structure and a preferred orientation with c axis perpendicular to the substrates. The lattice constants of MgxZn1-xO films are similar to those of ZnO films. Raman spectra of ZnO and MgxZn1-xO films reveal that the MgxZn1-xO films have not only hexagonal wurtzite structure, but also higher crystalline quality than ZnO films. AFM image indicates that the MgxZn1-xO films are polycrystalline.