Raman Spectroscopy of Amorphous Diamond Films

The ion energy is a crucial parameter for amnorphous diamond films deposition. Amorphous diamond films (a-D) were prepared by magnetic field filtered plasma stream system. TheRaman spectroscopy and surface morphology of a-D films deposited at various substrate bias volt-ages V_b were studied. The results show that a-D films, deposited at V_b in the range from -10Vto -50V, have a single and nearly symmetric very broad Raman peak range from 1200cm~-1 to1800cm~-1. The surface morphology of these films is very smooth and uniform. However, for samples deposited at V_b -10V or V_b -50V, the Raman spectra exhibit two broad peaks centeredapproximately at 1350cm~-1(D peak) and 1580cm~-1(G peak), and the surface roughness will beIncreases.