A Technique of Burn-out for Low Temperature Cofired AlN Multilayer Substrates
Source abstract
Abstract
A technique of burn-out for low temperature cofired AlN multilayer substrates was introduced,which consist of high thermal conductivity AlN ceramics and metal W. The effect of the evolutionof carbon during burn-out on AlN sintering characteristics and microstructure was studied. Theresults showed that two-step burn-out process may solve the contradiction between W oxidationand residual carbon.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Advanced ceramic materials synthesis · Metal and Thin Film Mechanics · Induction Heating and Inverter Technology
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