Joining of Molten Salt Reaction Metallized Si_3N_4 to Si_3N_4

Based on the deposition of titanium films on Si3N4 surface by molten salt reactions,the wetting behavior of a liquid CuAg eutectic alloy on the titanium metallized Si3N4 was studied,it was found that, the metallized sample can be fully wetted by the eutectic alloy. Based on this result, the joining of metallized Si3N4 to Si3N4 waJs successfully obtained and the joining technique was systematically studied. TEM observation on the interfacial structure of the joints found that Ti-Cu-Si-N phases widely existed at the interface and their possible effects on the shear strength of the joints were also discussed.