Analysis to Microstructure and Photo-Luminescent Properties of CuO/SiO_2 Composite Thin Films

Cu/SiO2 composite thin films were deposited on n-type Si(111) substrates by radio frequency(RF) magnetron co-sputtering method,annealed at high temperature in N2 atmosphere,then cooling and oxidation in the air to fabricate low-dimensionality CuO nano-structure.The micro-structure and photo-luminescent properties were studied.The main phase of sample is cubic CuO(200) crystal face and sample forms nano-line structure with Cu,O elements as the main components to form CuO/SiO2 composite thin film in the sample surface after annealing at 1100℃.The ultraviolet light and purple-light appear in photoluminescence(PL) spectra,which is Abscribed to the electron transition from the defect level,resulting from the Cu vacancies to the conductor band of CuO composite thin films.