Preparation and Oxygen Sensing Properties of α-Ti_3O_5 Thin Films
Source abstract
Abstract
The preparation and oxygen-sensing properties of α-Ti3O5 films were studied. The results of testing show that the Ti3O5 film with orthorhombic structure (α phase) can be obtained by reduction TiO2 thin films in H2 atmosphere. The α-Ti3O5 film is stable up to 650℃ in air. It has low resistance-temperature coefficient and certain oxygen-sensing properties, but its oxygen-sensing properties need further improvement.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Gas Sensing Nanomaterials and Sensors
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