Deposition of Low Resistive Transparent Conducting Zn_xCd_(1-x)O Films on Flexible PET Substrate at Low Temperature

Low resistivity transparent conducting Zn_xCd_(1-x)O films were deposited on flexible Poly- ethylene Terephthalate(PET)substrates by DC magnetron sputtering.Structural,electrical,and optical properties of the films with different Zn concentrations were investigated.XRD results show that for x≤0.5,the structure of the film is in CdO phase,while for x0.5,oriented ZnO phase is dominant. Hall results shows that the Zn_xCd_(1-x)O films has very high carrier concentration when x≤0.5,and the electrical resistivitiy of the films is at the order of 10~(-3)Ω·cm.Carrier mobility shows a maximum value at x=0.5.The transmittance of the Zn_xCd_(1-x)O films in the visible range is much higher than that of pure CdO film.It's concluded that x=0.5 is the optimal value at which low electrical resistive,high visible transmittance Zn_xCd_(1-x)O films can be deposited at low temperature on flexible substrates.