Effect of Deposition Condition on Deposition Mode and Morphology of Pyrolytic Carbon

The effects of deposition tempertature,flow of C3H6, total pressure on the morphology of deposits were studied with C3H6 as source material, Ar as dilute gas. Three kinds of morphologywere accounted by using the principle of the nuclei-growth of crystal. It was showed that thedeposition mode of Pyrolytic carbon changes from surfacial nuclie-growth mode to droplet modeand gasous nuclie-borne mode as increasing deposition temperature and total pressure. The effectof flow of C3H6 on deposition mode underlies different principle under different deposition temperatures. The change of the morphology of Pyrolytic carbon can be determined by the changesof deposition mode of Pyrolytic carbon with deposition condition.