article·2002-01-01

Mechanical Property and Interface Structure of TiN-coated Ceramics Insert by Arc Ion Plating Process

Qin Zhang

Abstract

TiN coating was deposited on alumina based ceramics insert by arc ion plating process and enhances the flexural strength and Weibull modulus effectively. The results of SEM, XRD and Secondary Ion Mass Spectrometry (SIMS) indicate that the flat and smooth coating is of cubic structure, having (220) preferred orientation. The coating adheres to the substrate compactly and both of them have interdiffusion near the interface.
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Research context

OpenAlex topics: Metal and Thin Film Mechanics · Copper Interconnects and Reliability · Advanced ceramic materials synthesis

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