Synthesis of SiC Ultrafine Powders by Thermal Decomposition of LPS

Fine amorphous silicon carbide powders were prepared by vapor phase decomposition fromthe low-molecular polysilane(LPS). The pyrolysis mechanism of LPS under Ar atmosphere andthe influence of the pyrolysis conditions (temperature, duration, LPS and Ar gas flowing rate)were discussed. The silicon carbide fine powder less than 0.1μm obtAlNed after pyrolysis processis amorphous with 34%~35% carbon and 3%~4% oxygen.