Phase Diagrams in C-H-N System for Low Pressure CVD Diamond Growth

The ternary C-H-N phase diagrams for low pressure diamond growth were theoretically calculated through thermodynamic analysis. Thcre are diamond growth regions in these phase diagrams. Almost all the diamond growth regions in triangle phase diagrams located below the CH4-N line in the low carbon concentration region, and its shape and position change greatly with substrate temperature. The diamond growth regions allow us to optimize the experimental conditions of low pressure CVD diamond growth with nitrogen addition.