Crystallization and Structural Transformation of TiO_2/SiO_2 Composite Thin Films

The crystallization behavior and structural transformation of Sol-Gel TiO2/SiO2 thin filmsyaring with composition, temperature, time were studied. With the increase of TiO2 concentration,the temperature of TiO2 crystallization and the rate of structural transformation from anataseto rutile were decreased. The temperature of SiO2 crystallization and the grain size of anatasecrystallites decreased and increased with the increase of TiO2 concentration respectivelyl and thelater one increased with annealing temperature as will. The grain size of TiO2 crystallites wasvaried linearly with the root square of annealing time. The difference of the rate of struCturaltransformation from anatase to rutile depends on mainly the stress in the films.