Microstructures and Superhardness Effects of NbN/TaN Nano-multilayer Films
Source abstract
Abstract
The polycrystalline NbN/TaN nano-multilayer films were grown on the substrates of stainless steel by reactive magnetron sputtering. The microstructures and microhardness of the nano-multilayer films were studied by X-ray diffraction (XRD), transmission electron microscopy (TEM) and microhardness tester. The results show that the NbN layers are cubic crystal structure and TaN layers are hexagonal in the NbN/TaN multilayer films. NbN/TaN nano-multilayer films have superhardness effects with a modulation period from 2.3nm to 17.0nm. The maximum hardness HK is 51.0GPa.
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Research context
OpenAlex topics: Metal and Thin Film Mechanics · Boron and Carbon Nanomaterials Research · Diamond and Carbon-based Materials Research
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