Structure and Mechanical Properties of Ti Alloyed DLC Films

Ti alloyed DLC films were prepared with a Y B H N Ⅱ A-1 deposition device by dual-excitation energy source. The mechanical properties and structures of the films were measured and analyzed by Nanoindenter, Microhardness Tester, Atomic Force Microscope, as well as X-ray diffraction and X-ray Photoelectron Spectroscope. Tribological tests were carried out on a ball-disk friction and wear tester. The performance change of DLC films with different Ti alloying was investigated in view of heat treatment. The results show that the mechanical properties of the films are not monotonous with Ti contents, and the friction coefficient increases with Ti content; the obvious microhardness increase results from the formation of hardened TiC phase.