Fabrication of Cubic Boron Nitride Films by Electron Cyclotron Resonance CVD Assisted with Hot Filament

Cubic boron nitride (cBN) is an important compound of theⅢ - V group. It attracts much interest for years around the world due to its excellent properties which are similar to or prior to those of diamond. The fabrication and properties investigation of cBN is one of the attractions to materials researches for decades. In this paper, the fabrication of cBN films by ECR CVD technique assisted with a hot filament was reported. The results show that negative bias is not the unique factor for formation of cBN, the active particles is also an essential factor.