Calculation of Phase Diagram for Diamond Growth in C-H-Cl System

According to the non-equilibrium thermodynamic coupling model, a phase diagraxn for diamond growth in C-H-CI system was calculated. A diamond growth region whiCh is in goodagreement with many reported experiments exists in the calculated phase diagram. Compared tothe diamond growth region in the phase diagram of diamond growth in C-H system, the diajmondgrowth region presented here moves toward the end of low substrate temperature. The effectof chlorine addition on diamond growth in the vapor phase was also discussed according to thereaction mechanism.