Research and Development Status of Calcium Fluoride Crystals Used in Lithography System
Source abstract
Abstract
The reasons why calcium fluoride crystals can be used in lithography system were explaned. The research and development status of calcium fluoride crystals was summarized. Meanwhile the important problems need to be resolved in the process and measures that should be taken into consideration were pointed out. In the end the development foreground was expected.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Advanced Measurement and Detection Methods
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References
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