Photo catalytic Degradation Properties of Titanium Oxide Film Prepared by Mid-frequency AC Magnetron Sputtering

TiO2 thin films were prepared successfully by mid-frequency AC reactive magnetron sputtering technique. AES, SEM and XRD were used to examine the composition, surface morphology and microstructure of the TiO2 film, respectively. The photocatalytic degradation property of TiO2 film was investigated using methylene blue (MB) and methyl orange (MO) as the degradation object. The results show that the ratio of O to Ti in the thin film is very close to 2:1. The TiO2 thin film deposited at 250℃ is composed of anatase. TiO2 thin films prepared in this paper can photocatalyticly degrade MB, MO, and DDVP effectively. The TiO2 thin film after 10 times used no deterioration of photocatalytic activity can be detected.